User's Feedback System Report

Statistics

Total comments 3093
Comments with note 339

Comments overview


Other
Anonymous commented 18.11.2021 09:05
Bended tweezers in digestor 1.38room. Dear collogues, please, do not use tweezers to get rid of the tapes or glue, it is annoying to clean it.

Broken Equipment
lednicky@vutbr.cz commented 17.11.2021 18:45
Magnetron: Aluminium magnetron not working. Plasma is not turning on. I tried both sources, different cables, but it still behaves as it is short-circuited (high currents <300-700mA> no voltage).
Answer: Thank you for the information. The magnetron was opened and the Al target was moved to a different position. Now it should be OK. Honza P.

Other
Anonymous commented 15.11.2021 13:28
I feel really uncomfortable when the some of the operators do not follow the current COVID restrictions in the shared areas (e.g. hall, corridor, kitchenette). Given the current pandemic situation I think everyone (especially operators) should act responsibly.
Answer: We're all in the same boat here and the rules are the same for everyone, users and employees alike. But we're all human too, and sometimes we make mistakes (unintentional ones). We are doing our best to keep the labs open and operational. Thx, Richard

Other
Anonymous commented 8.11.2021 12:32
Several shared drawers in class 100 000 are occupied by some stuff even when there is nobody written in the list.
Answer: Yes, thank you. We are aware of that. We are planning to revise and empty all drawers that are unmarked or occupied by no longer active users, by the end of November. Regards, Helena D.

Broken Equipment
JB commented 4.11.2021 17:51
DRIE After the cleaning process, there were big, yellowish particles on the cleaning wafer.
Answer: Marek Elias: Someone forgot to start the cleaning process after etching. The chamber is completely cleaned now.

Broken Equipment
Anonymous commented 4.11.2021 17:47
Bruker Dektak XT (DEKTAK) The stylus tip is either slightly bent or dirty.
Answer: I check the tip and Its looks and works ok.

Missing item
Anonymous commented 26.10.2021 16:50
My colleagues and I would appreciate few pens in FILTER I.
Answer: Thank you for notifying us. The pens were refiled in the FILTER I. Regards Helena D.

Broken Equipment
IG commented 25.10.2021 10:52
Why is RCD8 still out of order? There is no notice in the booking system over one week. When will it work again?
Answer: The RCD8 has flooded the engine due to user misbehavior. We try to do our best to dry it and repair it. We are not able to tell you the correct date when the RCD8 will be fully operable. Thank you for your patience. RH

Missing item
Anonymous commented 21.10.2021 13:45
missing zip bags for cleanroom books
Answer: A new supply of zip bags has been added to filter. Jiří Holas

Broken Equipment
Anonymous commented 12.10.2021 13:14
TITAN Ceta camera
Answer: There is a problem in the part of the cooling circuit through CETA. Needs service intervention - supposed to happen next week. O. Man

Other
Jiri Liska commented 11.10.2021 17:27
Dear users, please, use the door like human. If you will use a high force, you can disturb experiments of other users. Somebody slammed the door three times in raw so hard, that my sample moved in 10 um on the Witec stage and microscope became unfocused. I have to start mapping again... Thank you in advance and have a good measurements, Jirka
Answer: Thx Jirka for your comment. We know about this problem and we are trying to solve it. The new BRANO system will be installed. But also closing the door gently helps a lot. Best, RisaK

Broken Equipment
IG commented 8.10.2021 11:44
RCD8 Stepper motor for pump2 is stuck. Hotplates are dirty and the temperature of the left one is higher than set.
Answer: The pump will be replaced as soon as possible. The hot plate will be repaired by the supplier. RH

Broken Equipment
Anonymous commented 7.10.2021 10:47
Microscope in Laser cutter/Parylene room. It is not working.
Answer: I will look at it on Monday, probably the fuse is KO. Vojtech Svarc

Broken Equipment
JB commented 7.10.2021 10:45
SUSS MA8 Mask aligner The lamp failed to start on two separate occasions. It started after waiting for cooldown and a second try.
Answer: I tried to clean the ground connector, if the issue remains, I will change the rules to leave the lamp bulb running without switching it off each day. Vojtech Svarc

Other
Jan Kunc commented 1.10.2021 17:03
The Materials Safety Data Sheets and the list of chemicals were moved to SharePoint. This has led to a practically unusable list of chemicals. There are only generic datasheets, however, a specific list of chemicals is missing. Eg., it is currently unclear, what kind of electron beam resists are present in the lab. The previous brief list was much better and it was possible to rely on it when planning the experiment.
Answer: The transfer of MSDS and Technical data sheets to the sharepoint has just sarted. The plan is to have an Excel file with the list of chemicals for each laboratory (an example is already in the MSDS folder for B1.14). The excel file contains an actual amount of chemicals in the lab, the MSDS folder contains datasheets of all chemicals that we ever had at CEITEC nano. Please wait for a few more weeks until we complete the transfer proces. Jiri Zita

Other
IG commented 16.9.2021 15:13
detected weak water flow in Kaufman instrument (water valve is fully opened)

Broken Equipment
L.S. commented 9.9.2021 14:09
DWL is working very slowly. Only a part of the design was exposed although the machine reported no issues after finishing.
Answer: We have already contacted Heidelberg service and hopefully, we will be able to solve this issue. The DWL is still working, but the expositions are 4-5 times longer than usual. Jiri Zita

Broken Equipment
J.S. commented 6.9.2021 18:12
DWL: Some kind of an issue with communication happened during the exposure (Socket exception) causing exposure to halt. Even through specialist instructed system reboot, the issue has not been resolved. Personally, I recommend to put the tool down until the issue would not be resolved by trained personnel. BR,
Answer: The DWL system was repared. The speed is same as before. Radim Zahradnicek

Broken Equipment
J.S. commented 3.9.2021 21:08
PRUSA-BLUE Tool is broken and not operable due to the PLA filament stucked inside of the heat-breaker (it seems to be a repeating issue). Solving this issue would require a significant amount of disassembly which would be surely overstepping the user rules. I would like to ask responsible personnel for necessary repairs. BR,
Answer: The issue has been cleared. There was a little piece of filament blocking the extruder gears - the disassembly of extruder idler door is actually permitted for users in attempt to check for stuck filament (common issue) since you can find the instructions in 3D printer quickguide in Documents library under "Troubleshooting". Best regards. Peter Fecko

Broken Equipment
lednicky.t@gmail.com commented 2.9.2021 15:09
Request for HDD replacement in the PC room for SSD (PC10 - very critical), maybe also other computers
Answer: Thanks Tomas for your comment. We have already ordered few SSD drives to replace that old HDD in the PC room. RisaK

Other
Anonymous commented 1.9.2021 12:23
The door between Filter I and II are not closing properly. It opens also when someone comes from the 100 cleanroom by itself.
Answer: The door lock was lubricated and tightened. Radek

Broken Equipment
rovenska@vutbr.cz commented 30.8.2021 09:26
Lab Spin not working - vacuum/cover not ok, no notification in the system
Answer: Thank you. Labspin will be repaired as soon as possible

Other
Anonymous commented 28.8.2021 11:51
Hi, today morning, small amount of oil like liquid (yellow colour) was on the floor between technical room 1.39 and experimental PECVD 1.41 ending here as 30x30 cm dirty place under desk. I used IPA and wipes and did my best to clean it up. I could not see any source of problem. Maybe it is in the technical room, where tracks finished. Jirka Liska
Answer: ME: That was the oil from the vacuum pump. I was moving it for repair. I cleaned up the corridor, but I forgot about the technical room. Thank you very much.

Broken Equipment
IG commented 27.8.2021 10:28
FUMEHOOD ETCHING NO.1 - left lamp is broken
Answer: Thank you for the info. Lamp replaced 30.8.2021 11:30. One broken lamp is also in Solvent hoods, but it needs a new starter this time, which must be ordered. Jiri Zita

Broken Equipment
IG commented 27.8.2021 10:24
LAPSPIN vacuum is low.
Answer: Thank you. Labspin will be repaired as soon as possible

Broken Equipment
IG commented 6.8.2021 10:01
Base pressure in Cl-RIE is too high.
Answer: ME: Someone else solved the problem. Today the device did not report this error.

Broken Equipment
IG commented 6.8.2021 09:59
Cl-RIE is full of impurities (flakes, etc.) again. Is it possible/allowed to etch Pt with Ar only?
Answer: ME: The chamber has been cleaned. You can etch platinum.

Broken Equipment
IG commented 6.8.2021 09:59
Gas cabinets for Si and NH3 in alarm state.
Answer: ME: Gas cabinets are online again.

Broken Equipment
michal.stano@ceitec.vutbr.cz commented 5.8.2021 12:10
ALD, unstable & decreasing Ar flow; likely Ar supply issue. Could someone check the Ar bottle & valves on the way? Maybe it is empty or something is closed... Thank you.
Answer: We have exchanged the Ar cylinder. Pressure should be OK now. Jiri Zita

Broken Equipment
Anonymous commented 9.7.2021 07:31
Verios. Discontinuous scanning in full frame, no averaging or integration filters on. Navigation in scanning widows using a double-click is not working. Navigation using the navcam working 50/50. Server restart did not help.
Answer: O.M.: This issue was caused by digital zoom left active for the most frequently used Quad 1 in the UI. Everything works fine after its disengaging.

Broken Equipment
JS commented 6.7.2021 22:53
I noticed that Marek Eliáš is writing here about me and the dirty PECVD. To make it clear, on Thursday someone started the PECVD cleaning program,. During Friday and Monday I deposited 4x1 μm layers. Even after the first layer, the wafer was slightly dirty, and with each subsequent layer, the dirtiness worsened. It was me who noticed this dirty PECVD.
Answer: ME: Why you did not inform me that the chamber is still dirty on Friday when you observed it? I could clean the chamber again before the next deposition and IG would not have the samples damaged. Next time, please, inform me immediately if something goes wrong. I cannot take any responsibility for such problems if I am not informed. Thank you!

Broken Equipment
IG commented 2.7.2021 14:00
XeF2 new valve link. https://www.radwell.co.uk/en-GB/Buy/NOR-CAL%20PRODUCTS/NOR-CAL%20PRODUCTS/3870-01215/?redirect=true
Answer: We will try to order it from the official producer/supplier, if available. Jiri Zita

Broken Equipment
GCH commented 2.7.2021 13:52
XeF2 machine is working again. The valve between cold trap and the chamber was stuck. Valve was cleaned and the nitrogen input pressure was increased to 4bars. Chamber needs new o-ring seals including the gasket between cover and glass window. Alarm button housing is broken - should be replaced.
Answer: Thank you for the update.

Broken Equipment
Ondra commented 28.6.2021 11:41
XeF2 - problem s cerpanim nevyresen, po proplachnuti vysevy dusikem zacala cerpat, nicmene, automaticke procedury, napr. vyplachnuti stale nefunguji - tlak nejde dolu a skonci to alarmem. Zkusil bych vymenit merku tlaku, vyveva vypada ze cerpa. Zacal bych merkou, kterou ma Imra v kanclu.
Answer: Thank you for the update.

Broken Equipment
Anonymous commented 25.6.2021 07:02
Rigaku 3 Unable to turn on Rigaku PC.
Answer: Unplugged power cable from PC, fixed.

Broken Equipment
Jakub Holobradek commented 21.6.2021 16:45
Team software for EBSD on Verios felt down two times after cca 1 minute of mapping (after 1 hour of preparing the measurement) :(
Answer: O. Man: After consultation with EDAX there were reset the network adapters connecting the detectors. It was possible to run an EBSD map afterward.

Missing item
lednicky@vutbr.cz commented 21.6.2021 14:31
Evaporator/safety - maybe it would be nice to buy a welding glasses. It is not safe to watch inside unprotected. (this was recommended in Lesker webinar)
Answer: HP: There is no need for glasses for trained users. The shutter can be opened for beam setup only when the power (current) is low. In that situation, you will not be able to see anything when wearing those glasses. If there is somebody, who does not know how to make the beam setup, please let me know and I will give him the training again.

Broken Equipment
IG commented 18.6.2021 14:40
Cl-RIE is dirty again? Could Pt etching be the reason???
Answer: ME: Platinum cannot be the reason. It was etched 14 days ago and since then the apparatus has been cleaned manually, so by discharge. I will try to analyze the "dirt" by the XPS

Broken Equipment
IG commented 18.6.2021 11:31
Minor issue: F-RIE drive D is full. It shows note "file already exists" during process.
Answer: ME: I made a backup of the experiment and cleaned drive D. It should be fine now.

Missing item
IG commented 17.6.2021 13:47
AZ9260 is low.
Answer: AZ9260 is no longer produced by the supplier, Use AZ 10XT Photoresist 520cp instead. Jiri Zita

Broken Equipment
Ondra commented 17.6.2021 10:52
XeF2 - still does not work after repair. Seems like oil pump does not pumping or the vacuum meter is not in proper condition.
Answer: XeF2 instrument is not a property of CF nano, and it was not in operation for a longer time. We are now focusing on the quick elimination of potential risks and discussing the ownership and connected responsibilities. Jiri Zita

Broken Equipment
IG commented 17.6.2021 10:26
Oil in rotary pump (XeF2) shloud be changed asap. It cotains big particles from etched plastic parts on outlet.
Answer: XeF2 instrument is not a property of CF nano, and it was not in operation for a longer time. We are now focusing on the quick elimination of potential risks and discussing the ownership and connected responsibilities. Jiri Zita

Broken Equipment
IG commented 16.6.2021 17:00
XeF2 instrument was in terrible condition. Top oil covers were leaky (1 cm etched holes). The main outlet before oil filter was clogged so the gas/vapor outlet was vented to the room. Do you know the potential hazards of this instrument? It is practically the most toxic instrument in CF nano. We should talk about that.
Answer: XeF2 instrument is not a property of CF nano, and it was not in operation for a longer time. We are now focusing on the quick elimination of potential risks and discussing the ownership and connected responsibilities. Jiri Zita

Missing item
Marie J commented 15.6.2021 14:34
I used up the last bit of the Gold Etch Solution, could we please get a new bottle? Thank you
Answer: Au etchant was added to the chemical box. Jiri Zita

Missing item
lednicky@vutbr.cz commented 14.6.2021 17:56
I would like to see some swab sticks (green plastic stick with cloth/cotton head) in stan labs (or even near SEMs), if possible.
Answer: Ondrej Man: there are three types of swabs available in A1.08 (two small and one wide type). They can be found in the second drawer from the top (stainless steel box) at the workplace under the fume hood. We will add labels to better navigate users.

Broken Equipment
IG commented 14.6.2021 14:52
PECVD is dirty again. It was absolutely OK last Thursday. ...how it is possible???
Answer: ME: The explanation is simple. The apparatus has to be cleaned after approximately 4 um deposited layers. Mr. Slavik deposited 2 um on Monday morning and finished the deposition at 11 a.m. Since we have meetings on Monday, I did not have time to clean it. The apparatus was cleaned Monday afternoon.

Broken Equipment
IG commented 14.6.2021 14:50
HMDS - cover sensor malfunction

Other
Marek V commented 11.6.2021 13:30
bryle ve 100 jsou v opravdu hroznem stavu - je problem najit nejake, ktere nemaji neposkozene sklo primo v zornem poli nebo nerozkvedlane nozicky. Prosim vyhodit a doplnit.
Answer: Some of the goggles were replaced. Some were just cleaned by IPA and returned to the box. Jiri Zita

Other
Ondrej commented 9.6.2021 16:00
It will be nice to not put small beakers into the small beakers after cleaning. there is bigger possiblitz that you can break one of the small or even everything when you must take out the small beakers from the big one everytime you want to use them. Thankx that you will reconsider it
Answer: Thank you for your comment. We will consider it for our next information letter for Nanofab lab users. Jiri Zita

Broken Equipment
IG commented 9.6.2021 14:10
RCD8 - dirty PR line of AZ5214, still some s**** on wafer after coating.... 4 months same problem
Answer: The problem is under detailed investigation. RH

Broken Equipment
IG commented 9.6.2021 14:03
RCD8 - No-NET error... 6motnhs, RCD8 sometimes does not respond
Answer: Marginal error from pump no.1 configuration - solved. RH

Broken Equipment
IG commented 9.6.2021 14:02
Cl-RIE RED ERROR
Answer: The problem was in the recipe for cleaning the chamber. If it was running in automatic mode, it sometimes made this error. I have modified the recipe, hopefully, it will be fine now

Warm
IG commented 9.6.2021 14:02
PVD

Missing item
Anonymous commented 2.6.2021 10:01
Not enough "green glass" for medium size samples in the fumehoods.
Answer: We will put the new glass in the fumehood during this week. Thank you for the update. Jiri Zita

Other
Anonymous commented 26.5.2021 16:17
There are clean room caps inside the sleeves of the share lab coats
Answer: While this may seem like the right thing to do for our environment, this behaviour is not in line with cleanroom laboratory rules. Please note that it is not hygienic to leave disposable cleanroom caps in the sleeve of a shared lab coat. We will let our users know again not to do so. RisaK

Other
Anonymous commented 24.5.2021 17:28
Door handle to the Raith and MIRA room is broken
Answer: The handle is repaired. Radek

Missing item
Anonymous commented 24.5.2021 17:27
Evaporator scissors have disappeared somewhere :(
Answer: Thank you for the information. I returned them back from C1.36 lab. Honza P.

Missing item
Anonymous commented 18.5.2021 12:05
Evaporator labbook is already full
Answer: New labbook was placed there...

Other
Premysl.Stastny@ceitec.vutbr.cz commented 17.5.2021 16:19
Software (PDXL2) in the PC room (building C) is not working (station 13, I guess). PC in XRD room (extra PC, not XRD PCs) is not connected to Rigaku 3 PC and the internet connection is incredibly slow. I do not see any possibility of how to get data on the PC, only using a USB flash drive, which is not allowed.
Answer: Software (PDXL2) in the PC room (building C) is working fine on both PCs (station 13 and 14). I check it regularly (last week). Please follow the instruction in *.TXT file. Those are old PCs and the hardware key is disconnected sometimes automatically. Unplug the key and plug it. It will start work again. Pavla R.

Missing item
Anonymous commented 5.5.2021 15:37
There are not any big zip bags for clean notebooks in filter 1.
Answer: All sizes refiled. Thx for letting us know, Risa Kolar

Cold
kiaba.michal@gmail.com commented 1.5.2021 11:27
UHV lab (17,7 C)
Answer: Probably there is some SW bug in the cooling system which might have an effect on this. We have to investigate and ask Synerga about this cooling issue. Thx for letting us know. Risa Kolar

Broken Equipment
igor.turcan@ceitec.vutbr.cz, jakub.holobradek@ceitec.vutbr.cz commented 27.4.2021 08:37
The computer, controlling the optical microscope in yellow lithographic room is not connected to the internet. It is not possible to save images.
Answer: It can be connected by wire or wireless. Mostly both options are available, but sometimes people take the cable and connect it to other systems and also wifi signal is week, but now it is connected by wire, and wifi signal is also good. Sorry for the inconvenience. M. Dhankhar

Broken Equipment
michal.stano@ceitec.vutbr.cz commented 20.4.2021 16:04
PC room - structural analysis PCs (13&14) unusable; PC14 HDD full, impossible to save even a JPG image. PC13 - also almost full HDD. GlobalFit SW impossible to start (SuperPro key not found). Please clean up the HDDs, preferably also use larger disks (is it really only 238 GB?!). Maybe change also where user data are saved... Also: another two PCs are without mouse... Update of the PCroom webpage (outdated contacts, list of SW) would come in handy as well.
Answer: Ondřej Man: those PCs are to be scrapped. The new ones are not fully installed yet (some pieces of SW from EDAX need service visit).

Missing item
lednicky@vutbr.cz commented 19.4.2021 17:18
Hello, a suggestion to add and organize the gadgets (bolts, clamps) for sample attachment for Magnetron and Evaporator. Maybe make more plates, clamps, and make a short list of how to use them (what is allowed and whatnot). Maybe also add some plate for sample holding in Diener (cos light custom samples tend to blow out) - or it is just an individual problem? Thanks
Answer: Bolts are ordered. Clamps will be solved asap, but for sure it will take more time. What is allowed or not is usually explained during training. If somebody is not sure about what is allowed or not, please do not hesitate to ask me. Honza Prášek

Warm
Marek commented 6.4.2021 14:28
v ciste satne je opravdu horko...
Answer: We are monitoring the status and trying to find the issue with the temperature fluctuations. Jiří Zita

Cold
Anonymous commented 30.3.2021 19:53
lyra
Answer: We keep the temperature constant at 22 C. Our temperature control system did not show any deviations from temperature during 30.3.2021. Jiri Zita

Other
Anonymous commented 29.3.2021 14:04
Rigaku 3 is broken for a long time, when will be fixed?
Answer: Ondrej Man: Unfortunately, we experienced severe breakdown (the main control board was shorted by minute water leak). The spare part was only available from the manufacturer in Japan and had to be made on request. That is why it took such a long time. Now the spare part is going to be delivered this week and it should be installed the next one.

Other
salamon@vutbr.cz commented 25.3.2021 15:53
My entrence card for the Verios was not working (its cuts me 15 minutes from the time for which I was waiting two weeks). Computer on Verios are meess, somethimes working together sometimes not. Way where and how to storage data is confusing.
Answer: Regarding the entrance card: It is not working because your access expired on February 2, 2021 (you have been notified on January 1). We did not get documents for renewal, that is why the access on your card was restricted. Please send us the documents ASAP. Thank you for understanding, Helena Dolejšová

Broken Equipment
Premysl Stastny commented 25.3.2021 07:41
Verios 460L. PC was very slow and freezed several times. UI collapsed 2 times. Immersion mode not working properly. Magnification and focusing was not working in immersion mode. I had to give up my work.
Answer: Ondrej Man: Usually xT microscope server and UI restart helps, probably including MPC restart in this situation. Premek already asked for assistance.

Broken Equipment
J.S. commented 16.3.2021 20:16
SUMMIT: Ilumination system is not working properly. System lighting works only on Laser channel and it is therefore not possible to change ilumination from SW. Power wiring should be connected to the AUX2 port instead of the direct connection to the wall - this would allow remote light switching measurement of semiconductors (light sensitive).
Answer: According to discussion with the user, the SUMMIT has several malfunctions but they are not critical for limited use. We will solve these problems with the maintenance service. Radim Hrdý

Missing item
Anonymous commented 15.3.2021 08:19
White cleanroom tape / C1.30
Answer: White tapes are available for everyone on the shelf in FILTER I. Jiri Zita

Broken Equipment
Jakub Sadilek (General user) commented 15.3.2021 07:43
SUSS-RCD8: pump1 indicating EMPTY BOTTLE warning - sound alarm ON. Bottle is not empty and nitrogen is bubling inside of the resist reservoir.
Answer: The problem was solved but we have probably still somewhere hidden pressure leakage. We will repair it as soon as possible. The functionality is not affected. Please, press the E button on the control panel behind the RCD8 door and press the next INIT in the software. The pumping will be restarted. *Radim Hrdý

Missing item
lednicky@vutbr.cz commented 13.3.2021 19:26
I found only two diamond cutters of which only one was not broken (the class 100). Please could you add some to room with magnetron, and one to room with reactive etchings.
Answer: We ordered the new diamond cutters. There is one at the magnetron and one at the RIE, now.

Missing item
Marek commented 17.2.2021 14:12
empty dispensers for IPA and acetone in 100 - please refill
Answer: Aneta is replacing them right now, during her regular chemical check - Monday, Tuesday, and Friday. Jiri Zita

Other
michal.stano@ceitec.vutbr.cz commented 16.2.2021 15:00
Rigaku3, Verios + others: outdated instruments' statuses - please update state and/or expected repair dates, specially for Rigaku3 and Verios where the given repair date already passed; Any news on DWL, Lyra? Last update more than 6 weeks ago...
Answer: DWL - on-line service support ongoing today. Regular service ordered, waiting for the serviceman to come - date not confirmed due to COVID restrictions - Jiri Zita Verios: status updated, Rigaku 3: date of repair depends on spare part delivery - date not known yet, updated estimated date of repair - Ondrej Man

Missing item
Anonymous commented 15.2.2021 10:53
There is no IPA in the Optical lab :-( KP
Answer: IPA is in the Optical Lab - Alois Nebojsa

Other
Honza Prasek commented 12.2.2021 12:11
Packaging bags 10x15 in CLR100 are missing
Answer: Ordered. Jiri Zita

Other
Honza Prášek commented 11.2.2021 18:19
No handheld multimeter in CLR 100. There used to be two, but there aren't any now.
Answer: Magic happens: unexpectedly, they reappeared in the laboratory from where they disappeared. Thanks to an anonymous wizard, Risa Kolar

Other
michal.stano commented 11.2.2021 14:39
Helios - no connection to SPC PC both from main and EDX PCs. SPC PC running and cabled... path does not exist... users saving data on desktop... huge mess
Answer: Thank you for reporting the issues. Both are fixed now. The MPC/EDAX - SPC connection issue is recurrent since the AVG firewall resets the "support network" to "public" profile from time to time. Image mess cleaned as well, the images were moved to primary data storage location to their respective folders. Regards Ondrej Man

Missing item
Anonymous commented 28.1.2021 10:08
no IPA and ACETONE in 100 (in the dispenser but I do not see it in the cabinet either)... please refill asap
Answer: Both canisters (IPA and Acetone) for the dispenser system (solvent hood) were refiled 27.1.2021 - but there was a leak in the acetone canister, so the dispenser did not work - fixed. Additional 1x2.5 L of acetone and 1x2.5 L of IPA were (checked at 11:00 am) in the Flammable cabinet. Additional 2x2.5L of Acetone and 1x2.5L of IPA was in the stainless steel transfer shelve. So there was a reasonable amount of Acetone and IPA available for users in 100 lab. Jiri Zita

Other
Anonymous commented 25.1.2021 14:59
Booking system unable to edit time or end session early, please fix or show us how to do, thank you.
Answer: The booking system allows to STOP your current running reservation (if allowed by the guarantor) - use the right-click on your reservation. The upcoming reservations you can CANCEL or DELETE (depends if DELETE function is allowed by the guarantor). If you have any other troubles with the booking system, please come to the User Office and visit me. Best regards, Risa Kolar

Broken Equipment
Anonymous commented 18.1.2021 16:37
solvent hood no. 1 / canster 2 is full. please solve it. thanks.
Answer: Fixed. We are currently working on a new Waste management system, so it should not happen in the future that both canisters are full. Jiri Zita

Other
igor.turcan@ceitec.vutbr.cz commented 6.1.2021 15:54
The fumehood on the right in the Photolithography laboratory C1.30 is full of stuff and nobody is working there. It makes the fumehood in the state not fit for use for other users.
Answer: Thanks for the notice. The e-mail regarding this situation was sent to the users. Erik Palesch

Broken Equipment
Anonymous commented 22.12.2020 13:09
RIE Turbo down
Answer: turbo is running

Missing item
PF commented 9.12.2020 17:56
DRIE dewar nearly empty
Answer: DRIE dewar is full

Other
Anonymous commented 4.12.2020 16:35
Users are leaving disposable caps and gloves in the shared coats. Would it be possible to send an email to users to remind them that for hygiene they shouldn’t do such thing.
Answer: Update regarding the necessary hygiene regulations in CEITEC nano cleanrooms sent to the users 7.12.2020.

Cold
Anonymous commented 2.12.2020 15:52
PVD

Other
Anonymous commented 27.11.2020 15:23
The door between Filter I and II is easily opened when the user wants to leave CLR100 corridor and opens the door out of it.
Answer: Fixed.

Broken Equipment
Mirek Bartos commented 27.11.2020 12:55
DWL I did lithography on quartz four inch wafer using optical focus. One third of the wafer was quite ok, then focus was lost and rest is useless.
Answer: Thanks for the remark. Optical focus is very sensitive for the height irregularities (very big roughness, dust particles etc.). It could have been defocused after going over some dust particle. Please, try again and make sure the resist layer is as homogeneous as possible and particle-free. If the same happens again, please report to me directly (via email) together with the images (these are important !) We will also investigate if there is some unrecognized issue with optical focus. EP

Broken Equipment
Mirek Bartos commented 26.11.2020 20:26
DWL DWL is not working for the second step of lithography. I would like to ask for alignement of camera system. Shift is roughly 40 microns in both axes. Thanks.
Answer: Thank you for the notice. It is true that we forgot to communicate to the users that overlay exposures will be most probably misaligned after the service visit for the laser exchange. The beam offset will be corrected ASAP. Sorry for the inconvenience. EP

Broken Equipment
Anonymous commented 20.11.2020 12:54
DWL - not working properly Dear all, DWL has resolution about 10 um after laser exchange. The device is not possible to use for structures smaller than 10 um. Good luck. Have a nice weekend Chmela
Answer: Hello Ondra, thank you for the info. We are in contact with the laser supplier trying to solve what could go wrong during the laser exchange. JZ

Broken Equipment
Anonymous commented 14.11.2020 14:09
Wireless network CFNano in the C1.30 does not work... it happens too often.

Other
Anonymous commented 5.11.2020 11:47
Filter 1 door cannot completely close
Answer: Fixed. RK

Broken Equipment
Peter Fecko commented 29.10.2020 14:12
RIE - Fluorine turbopump can't maintain speed, it's constantly shutting down and giving "Turbo lost speed" error few minutes after it reaches maximum RPM.
Answer: ME: There is a problem with communication with the dry pump. It will be fixed by Wednesday (I hope)

Bad luck
MB commented 25.10.2020 11:47
DWL is making the stripes in negative tone resist again. You can see secondary image of the beam during exposure. The results could be find on the pictures there: http://leteckaposta.cz/uploaded/101646425
Answer: Please contact me directly to describe the problem in more detail (type of the resist used; process conditions, and so on...). Slightly visible stripes in negative tone photoresist are normal according to the manufacturer statement, but this looks strange.. Thank you. E. Palesch

Broken Equipment
michal.stano@ceitec.vutbr.cz commented 14.10.2020 10:22
Door to Filter II - "lock" system does not work correctly; door "blocked" all the time even if other door closed
Answer: Fixed. JZ

Broken Equipment
no lights :-( but airflow ok commented 23.9.2020 16:01
Air shower
Answer: We know about this issue. The new control unit has been ordered, and we are waiting for the repair. JZ

Other
Anonymous commented 18.9.2020 13:11
Tweezers for stubs is missing (LYRA)
Answer: One user borrowed it and took it to the SPM lab. Now it is back where it belongs.

Missing item
lednicky@vutbr.cz commented 17.9.2020 17:15
I am missing 2000 or 2400 grinding paper for tegramin. Overall stock of grinding papers are low, also Allegro disc is K.O.
Answer: I checked today and there is still enough of grinding papers. We have some boxes with new ones in our storage and it’s refilled regulary. There is also another Allegro disc in the shelf under Tegramin. The situation with #2000 papers is that they had no supplies when we did last offer of consumables. We will be making a new order soon so I hope this time #2000 papers will be also provided. Holas

Broken Equipment
igor.turcan@ceitec.vutbr.cz commented 17.9.2020 09:14
Again...Three out of four organic solvent waste drains are covered that they are full. I don't believe that it is so hard to change the waste containter. It is really unpleasant to work only with one drain.
Answer: Two canisters in the left solvent fume hood were replaced. The other canisters will be changed when the waste disposal company will return the spare ones.

Cold
Anonymous commented 28.8.2020 16:31
Lyra

Missing item
Anonymous commented 22.8.2020 14:30
Hello, The liquid nitrogen dewar just went empty fryday evening.
Answer: StAn dewar bottle was refilled today. Holas The dewar bottle for DRIE is full again. ME

Missing item
igor.turcan@ceitec.vutbr.cz commented 19.8.2020 09:00
There are neither shared T5 overalls, nor free T5 overalls. Ca it be bought? If there is a necessity to wear overall when you have shorts, I think, there should be enough overalls.
Answer: You are right, thank you. We are aware of the problem and working on its solution (i.e. purchasing some more overalls and also coats). We sincerely hope that new supply will arrive ASAP. Thank you for your patience. HD

Broken Equipment
Karel commented 18.8.2020 15:18
rcd8 error / coating is not possible
Answer: RCD8 should be functional now. BTW, who is Karel ? There is no certified user of RCD8 with this name... EP

Broken Equipment
Anonymous commented 14.8.2020 13:13
all fumehoods are beeping... exhaust error... I dont know password for RCA and etching hood to could stop it
Answer: Beeping was caused most probably by the air conditioning instability due to the opened chemical loading door. It is OK now. EP

Other
Anonymous commented 13.8.2020 22:24
One squirt bottle for aceton for the solvent fumehood broke in C100. I put it next to the drier with the writing: broken.
Answer: Replaced. EP

Broken Equipment
PF commented 6.8.2020 14:26
RIE-Cl : gas cabinet alarm "Cl - Chyba ESO! Ventil zustal zavren"
Answer: The gas cabinet is alright again.

Missing item
jakub.pongracz@ceitec.vutbr.cz commented 3.8.2020 10:29
Leicacoat - nano is missing targets, I could not find them.
Answer: The targets were in a different room. Now, they are in the right place. Vojtěch Švarc

Missing item
PF commented 30.7.2020 17:03
DRIE - dewar is almost empty
Answer: Dewar is full now. There were still 50 liters of LN2 inside.

Bad luck
Anonymous commented 29.7.2020 14:37
Filament died

Missing item
Kormos commented 29.7.2020 11:34
no overalls T6-T1, maybe dont take overalls from users for washing if there are no replacements
Answer: Hi Lukas, we have supplied the FILTER 1. with more overalls for users. Still, unfortunately in the hot summer days, more users are coming in shorts/skirts and demand for overalls is higher than we can satisfy at this moment. Back to your advice. When it is dirty, it has to go to washing, and there is no excuse. Just one hint for all users, the overall for CR 100,000 is not typically for personal use but for a shared purpose. The regular garment for CR 100,000 is cleanroom coat and cap. Richard Kolar

Other
Anonymous commented 28.7.2020 12:09
CEITEC Nano WiFi in the C1.30 (Main yellow room) doesn't work.

Broken Equipment
zoltan.jehn@tuwien.ac.at commented 25.7.2020 17:48
Evaporator controller not working. The LCD of the EBG-21 labeled controller is blank. And the corresponding icon in the PC software is red. After a system reset it came to life, but during the motor initialization it went back to this idle state.
Answer: The Ferrotec Genius control unit freezes. The service has been already contacted. The date of getting it back online is still unknown.

Other
Anonymous commented 24.7.2020 14:19
Missing the clock in the litho room. How long does it take to change the bateries? :-)
Answer: It takes approximately one week. But we will try to do that faster next time. RisaK

Cold
Anonymous commented 22.7.2020 19:37
lyra

Other
Anonymous commented 22.7.2020 17:30
Black chair at Raman is wiggly - two screws already lost.
Answer: New lab chairs coming next week (28th July) - so it should help. RisaK

Broken Equipment
igor.turcan@ceitec.vutbr.cz commented 20.7.2020 15:15
The clock on the wall in the room C1.30 is not showing correct time.
Answer: Working on it. Thx to let us know. RisaK

Broken Equipment
igor.turcan@ceitec.vutbr.cz commented 20.7.2020 15:13
The left fumehood is loged off and it is impossible to log in and control it.
Answer: Solved. CF

Broken Equipment
Anonymous commented 20.7.2020 13:56
Mask aligner
Answer: For this issue, the answer is: The lamp bulb is switched on by: ON -> CP -> START; I am working also on the issue with the mouse and with the stitching (stitching looks better now).

Broken Equipment
Anonymous commented 14.7.2020 09:17
MPS150: There is a great table for Cascade MPS150 for well stable electrical measurements, thanks a lot. However, some users (the smalest one) cannot reach the microscope ocular lens (even standing on tip of foots)... Can you thinking about, how to fix it, please? Larger chair, stairs, etc. We borrowed some stairs from PLD but this is not ideal solution. Thank you a lot. JL
Answer: We are working on it (new PC&Monitor). Till that time, please use the stairs carefully :-) Hopefully it will be sorted soon. RisaK

Broken Equipment
Anonymous commented 10.7.2020 13:05
Raith 150Two. Load lock does not work.
Answer: This problem can occur if the sample holder is not placed properly or bit shifted. In that case, vent the loadlock and correct the position of sample holder and then it works. if still there is issue, the operators mobile no is there, u can call and it can be solved. Although the issue will be permanently solved after the Raith servicing by the end of july. MD

Other
Anonymous commented 10.7.2020 07:55
Booking system doesn't work again.
Answer: Thanks for your feedback, we are currently working on it. The SQL Server has been restarted today at 9 a.m. and now is monitored. RisaK

Other
Pekoš/VUT commented 10.7.2020 07:24
Booking system is not working right now. I will work without booking of the instruments.

Other
Anonymous commented 7.7.2020 19:03
Door to lab C1.34 is hard to close
Answer: Defect removed. Radek

Broken Equipment
Anonymous commented 6.7.2020 15:53
Booking works again.

Broken Equipment
Anonymous commented 6.7.2020 15:44
Booking system doesn't work.

Broken Equipment
Chmela + Sadilek commented 3.7.2020 16:41
DWL write head offset - after 2 weeks of complains, write head offset (x:-22um/y:10um) was recalibrated to (x:0.3um/y:0.3um) by user. Have a nice weekend Chmela
Answer: Beam offset measurement will be repeated. Last calibration results were inconsistent (offset 7 um, then 3 um with next measurement, then 10 um and so on..) which may indicate some more unusual behaviour of the instrument. Anyway, thanks for the help JS. EP

Other
Anonymous commented 3.7.2020 14:57
Big thanks to the CEITEC Nano Committee and others for hosting a nice summer grill party yesterday :)

Broken Equipment
Anonymous commented 1.7.2020 17:44
The RIE-fluorine is not working, more detailed: - Turbo is not running up after changing the sample - If it runs up after reset it does not open the butterfly valve
Answer: The turbo pump running without problem now.

Missing item
Anonymous commented 1.7.2020 17:43
Sulfuric acid is missing from C100.
Answer: Refilled - in the stainless steel transfer door. JZ Correction - new acid canister was put into plastic loading door of C1.31. EP

Missing item
MiB commented 30.6.2020 17:35
Hi, Ipa and also aceton is missing in the automatic dispenzer.
Answer: Both acetone and IPA refilled. JZ

Broken Equipment
michal.stano@ceitec.vutbr.cz commented 29.6.2020 09:57
ALD - MFC error ("system is not running") when starting purging of headspace above precursors; Ar flow seems to be too low (1 sccm and 5 sccm for Ar MFC0 and MFC1, respectively) and does not respond to changes in setpoints. MFC issue (instrument issue) or Ar line issue? Otherwise the system is under vacuum with standby heating, so rather safe...
Answer: The Ar cylinder is currently empty. The new one will be installed tomorrow at 30.6.2020. Ar cylinder connected to the Ar lines 30.6.2020 14:00 - JZ

Missing item
MiB commented 24.6.2020 14:45
Ipa canyster is empty. Please refill it.
Answer: Refilled. EP

Missing item
SV, SJ commented 18.6.2020 14:10
No Acetone in the FS-I delivery system.
Answer: Refilled. EP

Other
angry user commented 18.6.2020 09:59
Somebody has five bookings in verios??
Answer: OM: Thank you for the alert. The user has been warned and over-limit bookings were deleted.

Broken Equipment
IG commented 15.6.2020 15:58
IBAD - somebody tear off the RF cable from KAUFMAN ion beam source.
Answer: The user has been found and warned to be careful next time. RisaK

Broken Equipment
michal.stano@ceitec.vutbr.cz commented 15.6.2020 12:43
Multimeters (3pcs, UT81C) in the electrolab were dead (batteries?). I replaced the batteries (4x AA) for one of them, but the other two still require attention. It seems that this happens maybe too often... There should be some autopower OFF function, could you please check that it is activated? Some users maybe forget to switch off the multimeter...
Answer: Thx Michal for your information. The Multimeters were checked, and death batteries replaced. Spare batteries will be stored next to multimeters for more comfortable replacement soon. RisaK

Other
Marek commented 15.6.2020 12:18
See this photo: https://www.dropbox.com/s/ln3ejapcn5p6ld4/2020-06-02%2008.59.02.jpg?dl=0 It is so ridiculous that I don't even know how to comment it :D It has been there for a while and I still expect the PMMA developer to be back in this bottle where it has been EVER SINCE the creation of CEITEC Nano. The big original containers are not practical for pouring 10ml like many people do. Also if you supply something, do it INTO the chemical cabinet and NOT into the door - many people do not even know there are additional supplies and it is full of mess.
Answer: Smaller bottle with PMMA developer was reintroduced to the storage cabinet. Users may refill it from the bigger plastic canisters, everything for refilling is available in the lab (funnels, canisters, etc.). It is normal to find newly supplied chemical in the lab loading door - every user is notified during the fume hood training that chemicals are stored in the storage cabinet, and new chemicals can be found in the loading door. The user should put such chemical into the storage cabinet after use and not return it back to the loading door. CF Staff

Missing item
Igor Turcan commented 9.6.2020 14:56
The huge bottle of PMMA developer AR 600-56 is getting empty. Can you please supply a new one? Thank you.
Answer: Supplied. E. Palesch

Broken Equipment
Igor Turcan commented 4.6.2020 16:04
Both fumehoods were full of empty beakers in the morning. In the afternoon, the empty beakers were still there, plus, there was a note under the beakers that it should be cleaned. I don't think that using notes will help. If users don't clean after themselves we will not have any empty place for work left. I believe it can happen to anybody that he will forget about his beakers in the fume hood, but we have cameras everywhere, so it should no be so hard to know whose beakers were left there.
Answer: Some unlabeled dirty beakers in the fumehoods were cleaned in the morning by ceitec nano staff. Owner of marked beakers was asked to clean them. The rest of beakers was left in the fumehood and marked with request to responsible user to clean them. Based on your information from the feedback system we will search the camera records for the responsible user, but sometimes it is difficult to find the one, who is guilty. JZ

Other
JP commented 4.6.2020 11:37
In men's cloak room, nails sticked out from shoe cabinet. One user almost damaged his trousers on the nail. I knocked in the nails, however, it needs permanet solution. (Simply in Czech: vyčnívající hřebíky z botníku)
Answer: A suitable solution is being sought. Radek

Other
JL commented 2.6.2020 07:19
Caps are missing in 100/100,000
Answer: Sorry, we aware of that. There was a lack of disposable caps at the manufacturer due to coronavirus crisis. The new supply should came any day now. Please use washable caps in the meantime. Thank you, HD.

Warm
Anonymous commented 31.5.2020 11:49
DRIE: LN2 dewar needs refill
Answer: LN2 dewar is full

Broken Equipment
Pat a Mat commented 30.5.2020 19:31
DRIE >> LF source is not running - Matching at 100% and no indicated forward power.
Answer: The LF source running

Broken Equipment
Pat a Mat commented 30.5.2020 19:30
PECVD pump malfunction. System is inoperable.
Answer: The pump has leak in the cooling system and has been blocked. The guarantor was to be contacted for deposition. It was written in the reservation system.

Broken Equipment
Miroslav Bartos commented 29.5.2020 16:15
Microscope next to laser dicer is not working. I would like to know if or when will be repaired. Thanks a lot.
Answer: The microscope was sent for service, it should be back in the 25th week. JZ

Broken Equipment
Honza P. commented 29.5.2020 13:16
Central vacuum cleaner is not operating.
Answer: Aalready in operation. Radek

Broken Equipment
Eva Stastna commented 27.5.2020 15:43
Team on Verios did not cooperate. The program started after several Team and EDAX PC restarts and one attempt to do the analysis in Edax Genesis (maybe the Team was jealous...).
Answer: The TEAM issue is long-lasting. After the Covid measures being released, the service intervention starts to be possible. EDAX service team contacted to confirm a date. O.M.

Other
Jiri Liska commented 27.5.2020 12:04
Missing 2 screws in the chair in 100 class near Dektat - bit danger for users to use it.
Answer: Thank you Jirko for the warning. The chair is already repaired. Radek

Broken Equipment
PeFe commented 22.5.2020 10:28
PECVD- NO waterflow to generator
Answer: Thew water is alright

Missing item
Anonymous commented 18.5.2020 12:56
small zip bags filter 1
Answer: Zip bags filled in - JZ

Broken Equipment
Miroslav Bartos commented 15.5.2020 14:49
Evaporator Error 26, pocket stucked on gold.
Answer: The instrument is alright.

Other
Anonymous commented 9.5.2020 16:10
Please, if you will cancel your booking, send email to notify other users. Especially if you have 4 hour booking. I said to supervisor booking is all full and suddenly someone cancel.
Answer: To which equipment it relates to? J.S.

Missing item
Anonymous commented 9.5.2020 15:47
peroxide methanol ethanol
Answer: Refilled - placed in the transfer doors. JZ

Other
PF commented 30.4.2020 16:05
DRIE - LN2 dewar nearly empty
Answer: LN2 dewar is full

Broken Equipment
P. Fecko commented 15.4.2020 08:32
RIE chlorine - unable to strike plasma, with or without CCP power source; when trying to start HF goes to 300W, and reflected power is also 300W. Also, the BCl3 gas branch is turned off
Answer: ME: The machine is ready for etching

Other
Anonymous commented 2.4.2020 10:07
4 inch wafer carrier for DIENER is missing.
Answer: JZ: Replaced with new one

Broken Equipment
Anonymous commented 20.3.2020 10:45
Wet bench for development The filling of the bath1 is not working due to a leak into the bench.
Answer: There was nothing wrong found out during the bath check-up. Everything works well. The most probable reason of the leak was that the sealing stick was not properly put in. EP

Other
Anonymous commented 19.3.2020 14:15
RCD8 cover is faulty - the sensor often breaks the spin-coating process because it thinks the cover is not closed. The issue is there for at least 1,5 week and is getting worse now. There is no notification about it in the booking system and I think there was no email to the users to inform about this issue. Please solve this ASAP.
Answer: The cover has broken right arm, it is visible. We are working on it. The safety door sensor is working properly. Sometimes, the sensor is giving the false signal of the open door due to bad closing,shifting or touching in the process time. Please handling gently with the door. RH

Broken Equipment
Anonymous commented 9.3.2020 15:48
RCD8 Arm position is not ready, it is little bit of the centre of the wafer so the wafer is not coated in the middle.
Answer: I would advise to initialize the arm position in the service menu again (Slot Service - Arm - Init). It is good practice to do it always before you start coatings. If this does not help, try another recipe.EP.

Broken Equipment
J.S. commented 6.3.2020 10:34
RIE F: there is no official information, but there is some contaminants (nanoparticles) in our RIE (based on F?). I heard this from few people before and my results showed it too. See ICON image before and after short-period 10 sec etching using Ar/SF6 plasma - 10 sec was enough to cover surface by these nanoparticles (size up to 200 nm). Before me, the chamber was cleaned. I see that in samples etched 24.2 and 4.3. https://www.vutbr.cz/www_base/vutdisk.php?i=205970ae71 The flake with 6x2 um and original height 20 nm is the main object for the etching. Original post has been send by Jiří Liška to the all RIE users.
Answer: The chamber will be completely cleaned during this week.

Broken Equipment
PeterFecko commented 3.3.2020 16:53
RIE chlorine; Ch1 Vacuum Switch/Low pressure switch sensor error
Answer: It is alright now. The sample is in the loadlock.

Broken Equipment
In the two fume hoods that are available are 4 organic solvents sinks and three of these sinks are with the label Do not use full. Two of them are in such a sta commented 27.2.2020 12:03
Fume hood
Answer: Canisters are usually replaced when both of them in one fume hood are full. The last time they were replaced is 2 - 3 weeks ago. The reason why 2 of them are full so soon (3rd one is faulty) is too high consumption of chemicals in the recent days. I changed one canister in the left fume hood so there is actually one to use, but the canister in the right fume hood is also quite empty. EP 16 pcs. of the labels for hazardous chemicals were added to the lab. JZ

Broken Equipment
Anonymous commented 25.2.2020 12:09
saw accutom. Nelze spustit rezani. Stroj hlasi chybu 42: Problem with safety wiring. Restart proveden 2 x. Chyba pretrvava.
Answer: Děkuji za info. Dnes nejsem v práci, zítra zkontroluji, co je za problém. Přístroj jsem prozatím v booking systému nastavil jako mimo provoz. Pro další info sledujte instrument status. Holas

Other
Anonymous commented 20.2.2020 17:02
ALD problem below: Solved for now. Thanks all CF support Radim Z, Radim H, H Prasek and colleagues.

Other
Anonymous commented 20.2.2020 10:50
ALD pc cannot be turned on. Can't reach Marek and Jiri. Anyone can come to support? Thanks.
Answer: The problem is solved. PC is running well. The samples were removed from the chamber. RZ, RH, HP

Other
Anonymous commented 20.2.2020 10:27
not enough common shoes in women locker room
Answer: Thank you for the memo. Some shared shoes were added. More pairs are going to be supplied as soon as it is ceaned. We are out of some sizes (smaller ones) but we are expecting new delivery in March. So it will be added soon afterwards. Regards, HD.

Broken Equipment
Eva Stastna commented 17.2.2020 15:37
Leica coater in StAn - the quartz (probably) did not measure the coating thickness correctly - the deposition process was finished very early. Then on the SEM it was obvious that the carbon coating was very thin (the surface was not conductive enough).
Answer: OM: Coater checked for common reason (mismatch between actual position of quartz and its setting in the SW) - seems not to be the the right cause. Eva was asked to report the result of her next attempt.

Other
Anonymous commented 13.2.2020 17:48
there is no water inside the clean room.Thank you!
Answer: Barrel refilled 17.2.2020 RK

Broken Equipment
imrich.gablech@ceitec.vutbr.cz commented 13.2.2020 11:52
DWL microcam doesnt work
Answer: Solved.

Broken Equipment
Anonymous commented 13.2.2020 10:40
Verios 460l. Unable to connect to support PC
Answer: OM: SPC & MPC restarted - the connection (both remote desktop and shared folder) is working now.

Other
On behalf of photolitoghraphy lab users commented 11.2.2020 21:40
- idea: yellow light foil filters for all the monitors - please empty canisters that should be empty and refill canisters that should be full
Answer: The canisters located under fume hoods are changed once they are both full. There is a note when one canister is full so you will use another canister for draining the chemicals. I will add some funnel to the rear sink to ease the draining. Acetone and IPA canisters for wash bottle refilling are checked every two-three days. Sometimes the demand is so high that we have difficulties to cope with canister refilling. If it happens that they are empty there are bottles/canisters with acetone and IPA in the storage cabinet so you might refill wash bottles from these. EP

Other
PF commented 11.2.2020 16:52
Just an improvement idea: It would be nice to have an exhaust tube connected for liquid nitrogen cooling outflow from the DRIE (and also maybe PECVD) machines to eliminate whistling and to divert nitrogen gas to service room HVAC.
Answer: I connected the nitrogen for DRIE.

Broken Equipment
ondrej.chmela@ceitec.vutbr.cz commented 11.2.2020 10:15
DWL makes stripes
Answer: Sometimes this effect occurs with low dose used for the exposure. Anyway, we will investigate if this is really abnormal behaviour - service visit is planned in one-two months together with the installation of optical autofocus and back side alignment stage. EP

Broken Equipment
Jakub Sadilek (CF Staff) commented 11.2.2020 09:38
FSII - Left light in the fumehood is not working - fumehood is therefore quite dark.
Answer: New light tubes ordered, should arrive soon. JZ

Other
Anonymous commented 6.2.2020 15:53
Some cameras don't work.
Answer: The replacement was already ordered 1month ago. So we are waiting for replacement of them. Unfortunately the Corona virus caused the delay of delivery of new cameras from China :-( so our czech camera system provider can not replace them at this moment. RisaK

Broken Equipment
Anonymous commented 5.2.2020 19:45
EDAX TEAM not working properly. Impossible to take an image of area of interest, no image is taken. It seems as if EDAX pause a beam during imaging. The same problem if you want to take a "blind" spectra. EDAX seems to pause a beam (counts per second drop immediately after clicking on survey, point or whatever type of analysis). Multiple restarts have not helped.
Answer: OM: Tested today morning. Stucking at point analysis not observed. Improper hand-over of beam between EDAX and SEM improved after "xT microscope server" restart. It was even possible to grab some 512-frame EDS map.

Broken Equipment
170178@vutbr.cz commented 2.2.2020 11:43
Lyra - FIB and SW, sent email to T.Samoril with details

Other
Anonymous commented 29.1.2020 17:11
The room C1.36, which is magnetron sputtering room, is very cold. If you stay in that room more than 30 minutes, you start to feel cold.
Answer: The temperature inside C1.36 (PVD) is kept at 21C. This slightly lower temperature is helping to cool down the instruments and support production of better layers. The temperature at the rest of the rooms is kept at 22C. JZ

Broken Equipment
Anonymous commented 29.1.2020 08:13
Verios, TEAM software. Minor issues with EDAX software if sample is tilted. Tilt of the sample must be always checked (EBSD analysis). Sometimes wrong tilt is uploaded to TEAM from microscope (for example 0 tilt instead of 55 °), than the tilt correction of image is totaly wrong. The only possibility is to restart team and do a sample tilt again. EBSD combine with EDS is not working, team gets stuck imediately and software must be restarted. Sometimes team "holds" the beam, in microscope interface there is "external" written on screen, but team does not operate with beam (no analysis runing). In this case if any button in TEAM is pressed (point analysis, collect spectrum etc.) TEAM gets stuck and must be restarted via task manager.
Answer: OM: Thank you for your feedback. It will be included in the "complaints" list for the EDAX service department.

Missing item
Anonymous commented 28.1.2020 22:13
Double sided triple rolled quadruple applied copper tape has gone missing. Had to make do with non-sticky copper tape and sticky carbon tape. Please help me and others ASAP. My utmost gratitude, local lab man

Broken Equipment
Anonymous commented 27.1.2020 23:09
Suss wetbench, unlucky me. during the night
Answer: Solved.

Other
Anonymous commented 27.1.2020 18:08
Still problem with eduroam Wi-Fi in CR 100 - authentication error
Answer: I added CEITEC Nano WiFi AP directly to the Photolithography Lab, so the signal strength should be fine now. EDUroam is also available in parallel. RisaK

Broken Equipment
J.S. commented 23.1.2020 15:23
SCIA: Software malfunction >> Computer restart probably necessary. Pumping and Sources are stopped.
Answer: System restarted. Problem solved.

Broken Equipment
Peter Fecko commented 22.1.2020 16:30
DRIE - dewar needs refill of LN2; PECVD - found an error "no waterflow to RF generator"
Answer: The dewar is full and cooling is alright

Cold
Anonymous commented 21.1.2020 14:40
Everywhere
Answer: I guess you have chills. We maintain a standard temperature of 22 ° C

Warm
Anonymous commented 21.1.2020 14:27
everywhere
Answer: I think you have a fever. We maintain a standard temperature of 22 ° C RK

Other
Anonymous commented 21.1.2020 10:10
No memory card in the camera in CLR1000 corridor. So basically you can't use the camera...
Answer: The memory card has been found and returned back to the camera. Sorry for inconvenience and thanks for letting us know, we really appreciate beacause it helps us to solve the problems even the small ones :-) RisaK

Broken Equipment
Anonymous commented 20.1.2020 11:35
The imaging parameters of VERIOS is not well optimized as before. I was not able to take High-resolution images even after precise alignment. Most probably the astigmatism parameters are the issue.
Answer: I tested the most used combination of 5 kV/50 pA and 5 kV/0,1 nA in immersion mode and found just minor misalignment at 0,1 nA in stigmator centering (which is normaly a control that does not need any user alignment). Tuning astigmatism, crossover and beam centering is otherwise a routine required at each session. If another voltage and beam current combination caused the reported problem, please, be more specific. Best regards Ondrej Man

Broken Equipment
184288@vutbr.cz commented 16.1.2020 19:46
LYRA, stage contacted the chamber, calibration(suggested by the system) is not working. I already wrote to Tomas Samoril, writing it here as well just in case. - Oleksii Zadorozhnii
Answer: Problem is already solved.

Other
Eva Stastna commented 10.1.2020 14:25
Team se pri EDS mappingu neustale sekal. Cloveku to uplne kazi radost z prace...
Answer: Víme o tom, problém je nesjpíše na straně operačního systému. S EDAXem domluveno dodání zcela nového PC. Zatím není stanoven termín. O.M.

Missing item
Anonymous commented 9.1.2020 14:38
Scanasyst Air tips on ICON SPM
Answer: The tips are already there. Sorry for delay. IgorT

Other
Anonymous commented 8.1.2020 17:08
Please do something with the gloves for cleanroom 100. They seem to be low quality and are really uncomfortable. Putting another pair of gloves over the first one is often a fight. Wearing them becomes frustrating with time.
Answer: We know about the problem. The quality of the gloves is actually ISO 9001 certified and should be high quality. The issue seems to vary batch to batch… Anyway, we have already inform our clean room supplier and ordered new gloves (different brand). As soon as it is delivered, the gloves will be exchanged. So, please be patient for a few days. Thank you for understanding. Helena Dolejšová

Other
RK commented 7.1.2020 15:03
Test2

Other
Anonymous commented 7.1.2020 11:33
no wifi
Answer: Where exactly is no wi-fi signal? Risa Kolar

Other
RK commented 7.1.2020 10:37
Test

Broken Equipment
Anonymous commented 25.12.2019 13:07
zeiss observer
Answer: Microscope checked, everything works normally. Jiří Holas

Other
Erik Hinkelmann, hinkelmann@vutbr.cz commented 18.12.2019 07:38
Lyra TC (Lyra 3) software issue: Even though the system keyboard is selected as the English one (and working fine for other programs), the Lyra TC software takes the Czech keyboard as input. Especially annoying when trying to log in and not knowing about the issue. Was not a problem on 26.11.19. I did not find a setting to change the keyboard in the software.

Other
Sobola commented 16.12.2019 23:03
The problem with doors to Filter 2
Answer: Fixed, should be OK. RK

Other
hinkelmann@vutbr.cz commented 12.12.2019 13:29
PC 13 in PC room does not boot. 'Reboot and Select proper Boot device or Insert Boot Media in selected Boot device and press a key'
Answer: Problem solved, SSD disk changed.

Broken Equipment
Anonymous commented 6.12.2019 18:38
Evaporator: Error 26 pocket jammed
Answer: ME: fix it

Broken Equipment
I would not rather say. commented 6.12.2019 15:48
RAITH: It is not possible to unload the sample holder. Please advice! :)
Answer: Its already solved. :) MD

Bad luck
Anonymous commented 6.12.2019 10:46
clumsy plastic tweezers

Other
Anonymous commented 4.12.2019 16:03
The usermeeting was too long.

Other
lednicky@vutbr.cz commented 3.12.2019 15:54
I am bit concern about usage of Arsen in a flowbox in cleanrooms 100 000. I was told by user that there is no better place to do it. Or is there??? Arsen + flowbox ? really?
Answer: Probably glovebox (next to the laser cutter) would be a safer place but you have to prepare all chemicals (except water for rinsing which is available in the box) beforehand. Filip Munz Actually powders in general are not allowed in our clean rooms/fume hoods/flow boxes. So as FIlip is mentioning, the glove box is the only place where you can manipulate with such compounds. I am not sure about your exact procedure, but we can discuss off-line. Jiri Zita

Other
Anonymous commented 27.11.2019 15:51
We want crocodile sandvich!
Answer: Me too :-) But it is refilled only twice a week. On Monday and on Thursday early in the morning. We are thinking of changing our suplier to Caffee+Co DELIKOMAT. Than it could be refilled more often. RisaKolar

Broken Equipment
IG commented 21.11.2019 13:48
mate to rozbity...netece voda v digestorich
Answer: Actually there was unplanned and unscheduled service of DI water system organised by Building S (12:00-13:00). It should take just 15 minutes. JZ

Broken Equipment
Pekos commented 21.11.2019 12:52
Solvent hood - water is not running, heater is disabled, all waste canysters are almost full...
Answer: Actually there was unplanned and unscheduled service of DI water system organised by Building S (12:00-13:00). It should take just 15 minutes. JZ

Broken Equipment
Anonymous commented 19.11.2019 15:18
Zeiss A2 (C1.30) live view not working
Answer: It can happen because of miscommunication b/w Zeiss and software. In that case try to remove the Zeiss wire from notebook and reconnect it and restart the software. MD

Missing item
Anonymous commented 19.11.2019 15:17
Timers in Etching lab are missing (C1.31)
Answer: New timers were added to Chemical Lab C1.31 and Photo-lithography lab C1.30. JZ

Broken Equipment
P Fecko commented 18.11.2019 21:44
Evaporator: the looking glass is barely transparent and when I tried deposition of Cr but there was zero deposition rate.
Answer: ME: new glass is inside

Broken Equipment
Anonymous commented 18.11.2019 20:51
RIE Cl shows multiple errors: * recipe canceled. There is no wafer in the chamber. * vacuum switch sensor error. * load-unload fail.
Answer: ME: The wafer is in loadlock now. RIE is OK

Broken Equipment
Jakub Sadilek (CF Staff) commented 16.11.2019 11:19
MA/BA-8: WEC HEAD stucked in the up possition, stage realeased anyway. Some issue found with the mask holder orientation too ... So machine is INOP at the moment. Critical mask inside (really expensive one), please take care.

Missing item
Jakub Sadilek (CF Staff) commented 16.11.2019 11:18
No Spare AZ-726MIF in the C1.30 RCD-8: AZ-726MIF developer tank Empty
Answer: Was refilled.

Missing item
Jakub Sadilek (CF Staff) commented 16.11.2019 09:31
AR 600-546 is missing in the C1.30 clean room (CSAR 62 developer).
Answer: Hello Jakub. This can happen, especially with excessive use. I assume that you, as an employee, have access to the chemical warehouse, so you can bring new chemical too. If you dont have access, contact responsible person to arrange it for you. EP

Broken Equipment
Anonymous commented 14.11.2019 16:47
the microscope in the clean room of c1.20 is not working, the bulb is broken I think

Broken Equipment
Tom and Jerry commented 14.11.2019 13:49
RCD8 in gearset mode dont work properly. When is started the motor oscilate. Please reapared protly.
Answer: I wanted to discuss this issue with Tom and Jerry personally but I really do not know where to find them at CEITEC Nano. EP

Missing item
Jakub Sadilek (CF Staff) commented 13.11.2019 08:59
No spare amount of MeOH in the lab.
Answer: MeOH added to the transfer doors. JZ (CF Staff)

Missing item
Tomáš Plichta (CF Staff) commented 11.11.2019 18:45
Mr-DEV 600 completely missing in the lab.
Answer: Mr-DEV 600 is not one of the chemicals which should be always available in the safety storage cabinet (list of the available chemicals is on the cabinet door). Please visit the warehouse or contact somebody from the CF Staff who has access to the warehouse to provide this chemical for you. If this chemical will have increased use in the future we will consider including it to the mentioned list of always-available chemicals in the lab C1.31. EP

Broken Equipment
PeFe commented 11.11.2019 15:44
RCD8: The maintenance door to HMDS fell off. The top hinge is missing a screw and while opening, it fell on my foot. The bottom hinge was unscrewed to prevent any further damage to it. Also, I want to note, that the cover door on rcd8 spincoater is wobbly and doesn't stay opened at some times (it falls down) and there is a risk it may fall down on operator's hands. The same applies to HMDS chamber cover, which is heavy and can bend metal tweezers.
Answer: The door was repaired. EP

Missing item
Jakub Sadilek (CF Staff) commented 11.11.2019 12:05
DMSO - Last 1l in the lab
Answer: 5L of DMSO TechniStrip are avaible in transfer doors to the lab for more than a month JZ (CF Staff)

Missing item
Xixia Zhang commented 11.11.2019 11:54
AR 600-71 is missing in the Yellow room lab. Please refill.
Answer: Refilled. JZ

Broken Equipment
Jakub Sadilek (CF Staff) commented 9.11.2019 18:09
DWL: Missing alignment pins: Pre-Alignment of the wafers / masks not possible in a right way. Please refill the pins or ask the machine shop to produce few pieces of the new version (there should be an undercut this time).
Answer: You can use custom made alignment tools which you may find in the drawer next to the DWL table. I will ask our technician to make new alignment pins for DWL. EP

Missing item
Jakub Sadilek (CF Staff) commented 9.11.2019 17:08
DRIE: LN2 level in DRIE dewar is very low. This prevents us to proceed with projects according to the schedule. Please consider refilling the dewars regularly and holding them almost full whole time - the LN2 is way cheaper then ruined time of the specialists, don't you think so?

Broken Equipment
Jakub Sadilek (CF Nano) commented 9.11.2019 17:04
PECVD: No LN2 available to the machine. Issue has not been mentioned in booking system neither on the equipment itself. Machine is not operable in this mode by "Normal" users. Please consider setting a INOP flag to the instrument if you know that it does not have necessary supplies. Is there any problem of holding dewars full all the time ?

Broken Equipment
Anonymous commented 6.11.2019 07:44
RCD8 dangerous to US, because cover self-holding mechanism is not working properly. It could destroy samples and caused injuries. Please react promply

Missing item
Anonymous commented 4.11.2019 17:11
Fumehood for solvents, IPA canister empty. Please refill it, thank you.
Answer: Refilled. JZ

Other
Anonymous commented 4.11.2019 14:05
Verios room copper tape is finished, please refill. Other users may use take from sample preparation room.
Answer: Copper tape replenished.

Bad luck
Anonymous commented 1.11.2019 17:31
hope next time it working after changing method

Broken Equipment
Erik Hinkelmann commented 31.10.2019 09:43
RIE F: HF power not in tolerance and reflected power too high for two recipes (O2 chamber clean and TiO2 etch)
Answer: ME: fix it

Missing item
Erik Hinkelmann commented 31.10.2019 08:57
IPA in Filter 1 empty
Answer: Refiled JZ

Broken Equipment
Erik Hinkelmann commented 30.10.2019 11:16
VP-8: Interlock issue with the cover sensor. Temporarily repaired, needs to be solved quickly.
Answer: >> Not SOLVED! I have just moved a lever of the induction probe slightly closer to the appropriate location. Erik you should probably repair the broken part guiding the sensor lever and actually whole cover not to move freely - Situation now is kinda dangerous for users / mine / anyone else hands and samples XD ;) update: Should be working now.

Missing item
J.S. commented 29.10.2019 19:02
RCD-8: Solvent is empty >> no reserve bottle has been found in the lab Developer is empty >> no developer in the warehouse *would be solved tomorrow In this state machine is INOP
Answer: All media replenished. EP

Broken Equipment
V.S. commented 29.10.2019 18:58
RCD-8: Strong smell of the solvent. Please check the exhaust.

Broken Equipment
J.S. >> I'll do that now. commented 29.10.2019 18:56
EVAPORATOR: Pocket jammed! No way to move it manually. Chamber have to be opened again.
Answer: Jakub Sadilek: Resolved >> Glass changed, all crucibles cleaned, copper hearth cleaned, cover plate cleaned intensively (like 2mm of Al scrapped out off it )

Missing item
Pekos commented 29.10.2019 10:47
Disposable clean room caps are missing
Answer: Yes, we are aware of that. We are expecting a delivery today. Disposable caps is refilled today or tomorrow. Please excuse this short outage and use washable caps for a moment. Thank you!

Broken Equipment
Anonymous commented 27.10.2019 18:42
Wetbench for coating - HP1, HP2: Hotplate precision ramping function is inoperable or the HP lucks the functionality at all. The thick resists (SU-8, mr-DWL) could not be processed properly and Graphene transfers are not an easy task either. The supervisor has been already notified more then 7 months ago. Thank you for solving this very unpleasant issue promptly!
Answer: Service was contacted. We are working on the fix for this issue.

Other
Anonymous commented 24.10.2019 11:43
food refrigerator is empty :(
Answer: Yes, we are aware of that. Apologies for the inconvenience. Lately there were some more urgent issues to solve first. We are going to refill ASAP. Although, if you are willing to help, you are the most welcome! It only brings benefits for you :)

Broken Equipment
Anonymous commented 14.10.2019 21:14
Evaporator - High voltage minimum error: 6
Answer: ME.: The HV generator was switched off.

Broken Equipment
peter.fecko@ceitec.vutbr.cz commented 29.9.2019 16:35
RCD8 - circuit breaker is going off when motor tries to initialize DWL f66 - writing is stuck at around 30%, cant be stopped
Answer: DWL is working well. RCD8 problem is being investigated...

Broken Equipment
lednicky@vutbr.cz commented 25.8.2019 15:37
Magnetron - equipment is not in operation state (inside: dismounted with missing parts), with no note in the booking system or even near the machine. So thanks for nice weekend :(
Answer: ME: I could not fix the thermocouple on Friday. For this reason, I extended my reservation until Monday. I do not know why it was not saved stored in the system. I apologize for the inconvenience.

Other
Anonymous commented 20.8.2019 14:17
Almost no Wi-Fi coverage for couple of weeks...
Answer: Please, could you be more specific? Where and which WiFi (EDUROM, VUTBR)? You are welcome to come to User Office. Thx: Risa Kolar

Broken Equipment
Eva Stastna commented 13.8.2019 17:26
Verios - EDX I could not open Team - the opening window appeared and then the program got frozen. Restart of the PC did not help. (It is probably one of those 5-seconds-problems I usually have but I could not solve it... :( )
Answer: Discussed by phone: EDAX TEAM SW currently unusable. Appears as more serious issue requiring service intervention.

Other
Anonymous commented 23.7.2019 09:47
depressed

Other
Anonymous commented 15.7.2019 15:24
women with head scarf should wear it under lab coat and hat, we are not suppose to expose our skin and clothes in clean room.

Other
Jan Slavik commented 12.7.2019 13:05
I agree it should be solved elsewhere, because you stI also agree it should be solved elsewhere, because you still did not answer my question about employes responsibility. I already wrote that it is not about booking equipment. I do not acuse or defent anybody, I highlight problem.ill did not answer. Bec my question and did not s
Answer: The employees of CEITEC Nano are fully responsible for their actions and they are expected to behave in line with the CEITEC Nano user manual. They may receive penalties for breaking the rules or any other wrongdoing as described in the Feedback respond from 25.4.2019 19:22.

Other
Jan Slavik commented 11.7.2019 16:01
I am reacting on last message. About that problem with DEKTAK which happened about 1.5 years ago. It was not last operator, but previous operator. I was doing booking according his instructions (described in previous message), but Mr. Zita said, that I should follow instruction from CEITEC manual, I got warning and DEKTAK operator did not get any message about this so he continued giving these wrong instruction to others (I found that much later). But recently, Mr. Zita told be to follow some rules which were not according CEITEC manual. So this does not make any sense, and this is the reason why I am writing about it here. But this is only example, other similar things happened more times. As bad example, once one user was using equipment without booking because operator did not gave him certificate yet and told him, that using the equipment without booking is okay. For user it is problem, for operator it is without responsibility. Let us say, that I will follow your instruction from previous message and I will book DEKTAK for 30 minutes and then intermittently use it for 2 hours. Then I broke rules because it is not written in CEITEC manual. No matter that you told me to do it this way. This already happened. I am not asking how to book DEKTAK in various circumstances. I am asking how users should follow instruction of CEITEC employees if they can give users wrong instruction, but responsibility have only users, not employees and nobody tell employees to stop giving these wrong instructions.
Answer: Dear Mr. Slavík, Based on your feedback, we will ask all operators to mention any exceptions in instrument booking and we will add them to the user manual so it will be in compliance with the common laboratory practice. Anyway, we do not want to use the feedback system as a tool to exchange accusations and defences. I would recommend a face to face meeting with user-committee members where we can discuss all issues and conclude on some measures to help also other users. Michal Urbánek and Jiri Zita

Other
Jan Slavik commented 10.7.2019 13:57
Last operator of DEKDAK gave me instruction that if I use DEKDAK intermittently I should book only one time. For example if I use DEKDAK 4x5 minutes during day, I should do one booking for 30 minutes. I followed his instructions and somebody complained that I use DEKDAK without booking. Mr. Zita told me that I broke rule of CEITEC Nano user manual and I got first warning, even though I followed instruction of operator. Nobody told anything DEKDAK operator, so he continued giving his wrong instructions to other users. Another thing is, that also other CEITEC NANO employees give instruction which are in contrary with CEITEC Nano user manual, including Mr. Zita. It is usually about booking of equipment and correct dressing in laboratory. So in conclusion: - CEITEC NANO employees can give users wrong instruction, but responsibility have only users, not employees and nobody even tell employees to stop giving these wrong instructions. If this is correct, how users can follow instructions of employees?
Answer: Dear Mr. Slavik, We are very sorry for your bad experience. In our evidence there is only one warning for you regarding DEKTAK reservation for not booking it at all and it is dated back to 24.1.2018, more than 1,5 year ago. It is possible to make reservation for some instruments (including DEKTAK) only once per day, but before the start of the first measurement. We will work on the unification of the information users are receiving from the operators, but it is always better to make a reservation to avoid conflict with other users. If you will see any CEITEC Nano user or employee not following the rules according to the user manual, please inform him about the correct procedure. The instructions in the CEITEC Nano user manual should be followed by all. If there is anything unclear in the user manual, please contact us eiter via feedback system or in person and we will clarify the correct procedure. Thank you for your feedback, Michal Urbánek and Jiří Zita

Other
Anonymous commented 4.7.2019 11:54
Few weeks ago, a door handle in StAn preparation lab has acetic acid/vinegar smell liquid. I was without gloves. I suggest users not to wear gloves (especially already in contact with chemicals) and walk around. For safety reasons.
Answer: The most probable reason for this contamination was some cleaning agent used by the cleaning maid. Nonetheless, regardless of the source of such contamination, we consider worth mentioning the general rules as suggested in the next user manual update.

Broken Equipment
Anonymous commented 4.7.2019 10:52
Wirebonder - two useful tweezers are needed. I was not able to repair the wire. Also, some gold stuck in the tip.
Answer: The wirebonder is now fixed and the tweezers are added.

Bad luck
Anonymous commented 3.7.2019 16:20
constellation of stars

Missing item
Anonymous commented 26.6.2019 18:19
not enough T4 overalls for CF100k
Answer: Due to summer temperatures = many users in shorts we are currently short of overalls for CF100k for some sizes. There have been refilled 3 more overalls size T4. More overalls needs to be ordered because we can hardly expect that users will bring proper cloth to CR of CEITEC Nano. RisaK

Bad luck
J.S. commented 21.6.2019 22:10
DRIE - selectivity was way to low on SOI ...

Other
Anonymous commented 17.6.2019 17:12
More hangers for coats

Broken Equipment
Anonymous commented 14.6.2019 18:13
zeiss
Answer: There was some issue with live imaging in Axiovision software. Now it’s fixed. Jiří Holas

Broken Equipment
Anonymous commented 28.5.2019 14:57
Titan is down because of water cooling system failure yesterday.
Answer: Titan recovered after another chiller restart, all optics boards restarted. Seems ready for operation.

Other
CEITEC Nano staff commented 20.5.2019 14:49
The users don't want to tell us what's wrong :-)
Answer: So we are satisfied:-)

Broken Equipment
premysl.stastny@ceitec.vutbr.cz commented 1.5.2019 16:17
Verios 400L, team software not working properly. EDX mappping is mission impossible. Team software stopped working each time after mapping had been started. Multiple restarts did not help. Connection between MPC and SPC did not work, all images must be stored at backup folder.
Answer: As discussed personally, the problem disappeared at the time the support network connection resurrected.

Other
Anonymous commented 1.5.2019 15:35
Verios - Primary storage at SPC not available even after restart. Indicated error :192.168.0.2 shareddata is not accessible, contact the administrator of this server.
Answer: Seems to have been a problem of local network connection (support network). Now working fine.

Other
Anonymous commented 25.4.2019 19:22
Does employers of CEITEC need to follow rules from general training manual? I see them regularly breaking these rules. What consequences they take from breaking rules?
Answer: All CEITEC Nano employees must comply with all safety and other regulations mentioned in the CEITEC Nano user manual. Compared to standard users, the employees can enter service rooms and work in the grey zones. We regularly emphasize to all employees that they must be the role models to all users, both during training and during standard laboratory work. If you see any bad practice, please let us know. If an employee is caught in non-compliance with the rules, he or she is warned during the CEITEC Nano staff meeting. There are no bans for CEITEC Nano employees, but repeated violation of the rules can lead to financial penalties. Michal Urbánek, Head of CEITEC Nano

Missing item
Anonymous commented 16.4.2019 14:37
There are no tweezers available in the optical lab (1.21).
Answer: Tweezers and other lab tools are placed in Optical lab in the shelf with sticker "TOOLS" - table under the FTIR (VERTEX). If there is anything missing please ask Alois Nebojsa or Filip Munz. RisaK

Other
Anonymous commented 16.4.2019 12:16
no wifi/internet in electrical char. lab.
Answer: I have checked the WiFi signal in Electro Lab - C1.57 and there is Eduroam and VUTBRNO. Both with medium signal, which means no problem. If you have problem with WiFi access in C building, please come to User Office and I can help you. Richard Kolar

Broken Equipment
lednicky@vutbr.cz commented 10.4.2019 19:43
Verios - support PC without internet connection, EDAX TEAM cannot connect (pop-up window with connection failed) to FEI SW (off/on server did not help)
Answer: There are two separate issues: 1) The EDAX - MPC connection fails most probably on the OS level - the remedy to that is to restart the MPC (proven, this works). 2) SPC connection to WAN was lost because of re-wiring the sockets in the distributor room (installation of the alarm loudspeaker system) - connection restored already.

Other
Anonymous commented 10.4.2019 09:35
I deleted my reservation in booking system but I cannot find the email option to notify other users that the equipment is free. Please provide instruction.
Answer: Please click on the certification button in the list of instruments (next to the instrument acronym in the left panel of your favourite devices) or go directly to "Certifications" and search for the particular instrument. Then open an e-mail (last column of found results) and you can notify all users of the device. Please always put the acronym of the concerned equipment to the subject of your message.

Broken Equipment
Anonymous commented 8.4.2019 19:10
Verios EBSD - EDAX SW is stupid, I dont have enough patience to continue, next time
Answer: As discussed in person, there are some dark corners in the SW. Restart of EDAX controller as well as xT server + UI should restore normal behaviour.

Other
lednicky@vutbr.cz commented 8.4.2019 16:43
Accuto-saw not cleanned. Also people are changing procedures of other users.
Answer: If you don’t want to have your procedures changed, you have to lock it. If you don’t know how to do it, just ask me and I will show you. It’s up to each user to clean the instrument after end of his work. The thing is that the cooling water, which also washes the dirt from the chamber, circulates between tank and chamber and the tank is quite small. So it’s almost never perfectly clean. General cleaning and maintenance is provided regularly every 1-2 months. Jiří Holas

Broken Equipment
michal.stano@ceitec.vutbr.cz commented 4.4.2019 17:07
Multimeters (marked) in the electrical lab (C1.57) are dead. Please replace the batteries.
Answer: thanx Michal, it is done

Other
Anonymous commented 4.4.2019 12:59
verios holders are running out soon
Answer: 1/2" pin stubs replenished. Ondrej Man

Other
michal.stano@ceitec.vutbr.cz commented 24.3.2019 18:29
Feedback form refreshed before I finished my previous message... If there is an automatic refresh, maybe you could extend the time interval when someone selects a feedback with a comment...

Other
Anonymous commented 24.3.2019 18:27
Reportedly multiple blackouts (power outage) on Saturday 23March. Reports from several users, someone from the CF supposedly informed. Check your instruments - some could be affected - e.g. NanoSAM inoperational (both ion gauge filaments burnt), supposedly some issues with Mask aligner, ... Measures related to blackout readiness and instrument backup to be revisited. Further discussion during the next CF Nano meeting. Michal Stano
Answer: Posílám vyjádření Antonína Adama: 1. Výpadek dle informací nebyl delší než 30 – 45 s. O výpadku jsem byl informován v 15:54. Takže čas, kdy nastal výpadek byl kolem 15:45. Přesný čas se dá zjistit. Na místě jsem byl kolem 16:45. 2. Vím jenom o jednom výpadku. Byl jsem osobně na místě i s kolegou Koutným. Navíc jsme se minuli s Radkem. Je možnost, že byl ještě jeden, ale ten mohl trvat jen 2 s. Ten jsme nepostřehli. V úterý jsem mluvil s energetikem, který má na starosti VN pro VUT. A ten mi sdělil, asi důvod výpadku, který byl na straně EON, když přepínali VN. 3. DA nenastartoval jen se připravoval ke startu. - 15 – 20 s. má čas, kdy začne startovat a připravuje se k připnutí na síť - dalších 15 – 30 s čeká a kontroluje zda opět není proud v síti. Po této době se teprve připojí do sítě. - aby se opravdu DA připojil do sítě potřebuje cca 45 s bez proudu na VN. 4. V laboratořích se rozsvítili evakuační světla, a nějakou dobu ještě svítila – i když už svítila světla normální - tohle je pro mne novinka, když jsem byl na C. Byl jsem v laser laboratoři C01.06 a náhodou jsme tam potkal uživatele, který mi potvrdil výše uvedené. S tím, že tam jen na chvíli zasvítili NO a vyplo se mu pár přístrojů. To samé mi potvrdila recepce. Prověřím 5. Problém se vzduchotechnikou - problém byl jen E3, kdy se musel ručně resetovat frekvenční měnič. Řeším se Synergou. Ostatní jednotky měly nastartovat normálně – automaticky.

Other
Anonymous commented 22.3.2019 09:03
Doors in the changing room are not making the beeping sound.
Answer: There is an issue on one of the doors which resulted in constant beeping and locking all the other doors. Thus the door security system was turned off. The building manager was informed and we are waiting for service company to fix the problem. JZ

Broken Equipment
Anonymous commented 21.3.2019 13:07
Imaging of SEM image in the Lyra EDX software was not working. The SEM image in the mapping was ok.
Answer: EDX is in fully operational state (PC and EDX Control unit restart can help in this situation and please check that the electrostatic beam blanker is switched off - active item - Beam is always ON).

Other
Anonymous commented 21.3.2019 10:03
ipa 10% cleaning filter 1
Answer: IPA refilled. There is a stock solution of IPA 10% under the table, so it is possible to carefully refile the Wash Bottle from this stock canister in urgent cases. JZ The funnel was added too :)

Other
Anonymous commented 19.3.2019 16:50
remote control - VNC - does not work for some instruments - Raith, VersaLab, ... Check settings, there were some changes in IP addresses
Answer: Now, it should work on most instruments. If it does not work on a particular one, please let us know.

Other
Anonymous commented 14.3.2019 10:58
more small shared coats
Answer: If there is none on hangers just take one from the shelf in the FILTER I. There is plenty of them. RisaK

Broken Equipment
Anonymous commented 13.3.2019 16:12
LEIS filament
Answer: Issue solved.

Other
Anonymous commented 11.3.2019 14:17
I was unable to find the way how to send feedback
Answer: You should be in the lab :-) http://cfnano.ceitec.cz/feedback/

Other
Anonymous commented 6.3.2019 15:30
Wifi in pc room is rather poor. Esp. for people with notebooks either wired connection possibility or a router dedicated for this room would be helpfull, thanks.
Answer: Dear user, please use one of the WiFi (VUTBR or EDUROAM). EDUROAM is faster and you do not to renew your connection when you come to CEITEC Nano next time. Tested speed in PC room (Download 50MB/s Upload 25MB/s). If you have any problem, please come to our User Office and we can find the way how to flow...

Other
Anonymous commented 24.2.2019 18:05
Magnetron: in mail send by Marek materials are different from the reality. however, logbook is updated. (probably an error in mail, both were done on Monday). :(

Other
Lukas Kormos commented 24.2.2019 12:55
I am sad today.
Answer: You cannot protect yourself from sadness without protecting yourself from happiness :)

Bad luck
Anonymous commented 14.2.2019 14:54
Deposition went wrong and I don't know why. I am an idiot.
Answer: You might not to be an idiot. Only the the Argon gas supply has been down for a while ... I have already changed the Argon cylinders and the situation should not occur again. We would like to apologise for any inconveniences it might caused you. CF Staff /J.S./

Missing item
J.S.> commented 6.2.2019 08:25
All kinds of the PP bags in Filter I (just few smallest ones are available)
Answer: Added. JZ

Broken Equipment
Anonymous commented 30.1.2019 14:04
The music not playing from the speakers.

Cold
Anonymous commented 25.1.2019 17:46
outside
Answer: "Winter is here." - Jon Snow

Cold
Anonymous commented 22.1.2019 16:40
outside, -10°C today!!!
Answer: We will try to do our best to keep you at 22°C inside.

Bad luck
J.S. commented 13.1.2019 17:42
DRIE is probably way to dirty ... I had a huge amount of BSi on the customers wafer...

Missing item
Anonymous commented 11.1.2019 10:32
clean pens please!
Answer: Would be solved in a minute :) ... K. Done ... JZ

Missing item
Anonymous commented 6.1.2019 11:43
lack of small beakers (100ml and smaller) in fumehoods
Answer: There are no more small glass beakers left in the warehouse. We need to buy new ones. Few small plastic (ETFE) beakers were added into the solvent fumehood shelf. CF Staff

Other
Anonymous commented 20.12.2018 14:26
Booking system not working..

Broken Equipment
lednicky@vutbr.cz commented 17.12.2018 16:39
Magnetron (venting not working, also it looks like it is not ready after bakeout)
Answer: The magnetron server was down.

Other
Peter commented 12.12.2018 15:39
RCD 8 is very dirty. Needs a little celaning.
Answer: RCD-8 is already undergoing the upkeep maintenance with cleaning - sorry for inconvenience it might caused you. This situation should not occur again. I would stress the necessity of proper upkeep of lithographic equipment during the next process meeting. Jakub S.

Bad luck
Anonymous commented 6.12.2018 16:22
Spadla mi paletka v komore.
Answer: It would be quite useful if you could provide us also information what kind of pallet and in which equipment. K.

Broken Equipment
Anonymous commented 4.12.2018 17:23
Reith EBL
Answer: What is exactly broken? Could you please provide a few more details? The best way would be to contact the responsible expert directly on his email >> robert.doczy@ceitec.vubtr.cz << or >> jakub.sadilek@ceitec.vutbr.cz <<. Thanks CF Staff :)

Other
Anonymous commented 28.11.2018 11:36
I need two times SEM training.

Other
Anonymous commented 27.11.2018 17:44
Xiaocheng wasted a wafer

Other
Honza Prasek commented 27.11.2018 10:20
Zamcena krabice nasich waferu v nove oznacenem a zamcenem boxu CF NANO STUFF (vpravo dole) na chodbe ve 100

Broken Equipment
Anonymous commented 20.11.2018 12:28
Uhv-preparation chamber.. there is high pressure in the loadlock.
Answer: The issue has been dealt with. Marek Otevrel

Other
Anonymous commented 19.11.2018 12:11
loadlocks used as storage boxes! only limited space there for things that really needs to be transferred! Why there are 3 multimeters inside? Already for few weeks...
Answer: We know about this problem. The lab cleaning staff has new instructions to clean the LoadLocks every Monday. The stuff from loadlocks will end in the "User mess box".

Other
michal.stano@ceitec.vutbr.cz commented 19.11.2018 12:05
booking system does not work!
Answer: We have already informed system provider and they are working on the problem. Please be patient, we will inform you once the system is back on-line.

Other
Anonymous commented 19.11.2018 10:54
Booking system is not working (again...) Please do something about it.

Missing item
Anonymous commented 9.11.2018 14:40
Chybí zip sáčky ve filtru I.
Answer: Two sizes of zipper bags were added to Filter I.

Other
Anonymous commented 7.11.2018 11:56
HANGERS ARE MISSING
Answer: Additional hangers were added.

Other
Anonymous commented 5.11.2018 17:12
I BROKEN MY cantilevers.

Other
Anonymous commented 2.11.2018 18:12
no liquid nitrogen

Missing item
VU 9220 commented 29.10.2018 19:39
Working processes and unexpired consumables for uv lithography

Other
Anonymous commented 29.10.2018 17:35
Full load lock to 100. Please remove stuff!

Missing item
Anonymous commented 26.10.2018 10:25
the glass acetone bottle is missing. And all of the bottles in wetbenches need refilling.
Answer: The valid rule is, that the users are refilling the IPA and Acetone bottles by themselves when needed (stock solution should be ready in the lab). Ethanol and methanol is refilled by the Core facility specialist. Currently we are working on more convenient system of IPA and acetone distribution. JZ

Broken Equipment
Sure you know, where to find me :D commented 26.10.2018 01:22
Wetbench for coating Pro brata slovakov - Loziska jsou v peeerdeli :) K.

Other
Anonymous commented 24.10.2018 13:30
Missing labbook on evaporator
Answer: The labbook is on evaporator.

Bad luck
Anonymous commented 10.10.2018 15:37
I broke the machine >(

Broken Equipment
Anonymous commented 26.9.2018 12:37
Vacuum, SUSS coater

Broken Equipment
HELIOS commented 23.9.2018 21:45
Ion emission has stoped and it was not possible to resurrect it :)

Other
Anonymous commented 19.9.2018 11:08
Nice feedback system. Good job Expert staff.

Broken Equipment
Anonymous commented 19.9.2018 11:07
Where is the automatic shoecover machine?
Answer: Automatic shoe-cover is currently under repair - will be fixed in few days

Missing item
Anonymous commented 3.9.2018 14:25
PGmea
Answer: Chemicals already ordered - late delivery - expected week 37

Bad luck
Anonymous commented 28.8.2018 15:50
both hand left ;D

Other
lednicky@vutbr.cz commented 25.8.2018 21:58
Teamviewer messing around. We need license or other remote control to use.

Broken Equipment
Anonymous commented 13.8.2018 13:14
LYRA FIB - Tomas Knows, I am just testing the system!

Broken Equipment
Anonymous commented 12.7.2018 17:57
DRIE

Cold
Anonymous commented 12.7.2018 17:56
everywhere...

Broken Equipment
Anonymous commented 28.6.2018 17:22
Evaporator

Broken Equipment
Anonymous commented 28.6.2018 14:59
evaporator

Other
Anonymous commented 28.6.2018 11:07
when i came i found device i was working on dirty.. as a last user was written me.. how can get device dirty if last user was me and i left that clean?

Other
Anonymous commented 27.6.2018 18:01
bad mood

Broken Equipment
Anonymous commented 27.6.2018 16:48
ultrasonic bath

Missing item
Anonymous commented 27.6.2018 11:21
Neustale jsou prazdne stricky a lahve na aceton a izopropyl. Chapu, ze se to muze vyprazdnit pri zvysene spotrebe, ale pri vice nez pulce navstev je proste prazdne vsechno a je dost neprijemne, ze prvni vec, kterou musite udelat je plneni. Neni to zrovna user welcoming. Pritom to povazuju za povinnost operatora, aby to doplnoval. Toto neni jen muj nazor, ale uz jsem se na tom shodnul s radou lidi, proto nenechavam sve jmeno, aby to se mnou nebylo asociovane. Jinak se dost veci vyvyji k lepsimu a na dost lidech je videt, ze se opravdu staraji! :)

Broken Equipment
Anonymous commented 26.6.2018 17:03
Better question would be which one is working

Broken Equipment
Anonymous commented 22.6.2018 17:14
DRIE, RIE

Cold
Anonymous commented 22.6.2018 14:21
electrical

Broken Equipment
Anonymous commented 20.6.2018 19:40
I was not able to connect Kepco using GPIB and LabView. I am an idiot.

Cold
Anonymous commented 13.6.2018 17:48
Depositions

Missing item
Anonymous commented 5.6.2018 16:06
Kapton tape for pvd lab

Broken Equipment
Anonymous commented 5.6.2018 16:05
Evaporator substrate heating,temp sensor

Broken Equipment
Anonymous commented 31.5.2018 16:08
Evaporator dead

Broken Equipment
Anonymous commented 31.5.2018 00:07
Ma8

Other
Anonymous commented 30.5.2018 09:20
Tablet was switched off.

Bad luck
Anonymous commented 28.5.2018 23:31
Everything

Broken Equipment
Anonymous commented 28.5.2018 20:07
Funny Raith errors

Missing item
Anonymous commented 26.5.2018 17:04
Capton tape in PVD room